FEI Company
XL850 electron microscope
The XL800 wafer scan microscope system is the latest series within the range of process-monitoring and analysis machines produced by FEI Company. The extensive range of products contains a scanning electron microscope (SEM), focused ion beam (FIB), and dual beam systems, with both manual and automatic wafer input possibilities (cassette-cassette and SMIF).
The smart machine layout enables individual units to be driven out in the service corridor around the machine, and all crucial components are easily accessed for service and maintenance.
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